Michigan Tech MFF Prospective Students Current Students Majors Athletics Alumni and Friends Parents Faculty and Staff Search A2Z Michigan Tech MCFF Microfabrication Facility
  MCFF > MFF > Capabilities > 8 Inch Sputter
Microfabrication Facility Capabilities
Sputtering is designed to deposit a wide variety
of materials onto substrates.

 

 

8 Inch Sputter Tool

8 Inch Sputter Tool

8 Inch Sputter Tool

Thin Films

PE 2400 Sputter Tool - 8 Inch

Perkin-Elmer Randex Sputtering System Model 2400

Location: Thin Films M&M 432

Standard Operating Procedures (PDF)

Inventory

See Also: 6 Inch Sputter Tool

Related External Links

PE 2400 Sputtering System
University of Notre Dame Nanofabrication Facility

Perkin-Elmer Plasma Products Division
ECONOMICAL ALTERNATIVES
The 2400 Series of Sputtering Systems

Inventory

TYPE MOUNTED ON A COPPER VACUUM PLATE
Co Yes
SiO2 Yes
SiC Yes
CoTi Yes
AlYt Yes
HfO2 Yes
C Yes
Y2O3 Yes
Unknown Yes
Unknown Yes
W Yes
Co-Zr Yes
Ge Yes
Ti Yes
Unknown Yes
MoSi2 Yes
Al(98%)-Nb(2%) Yes
Si-Al Yes
Unknown Yes
NiFe(19) Yes
AlZnO Yes
Cu Yes
Zn Yes
NiFe(17) Yes
Ta2O3 Yes
Cr Yes
LiO Yes
Mo Yes
Mo-(MoSi2)5.3 Yes
FeCo Yes
Empty -
B3F Yes
Al Yes
Si Yes
Si-(SiN)5 Yes
Cu Yes
Ni Yes
Al2O3 Yes

 

Top

Last updated August 29, 2009