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  MCFF > MFF > Capabilities > 6 Inch Sputter
Microfabrication Facility Capabilities
Sputtering is designed to deposit a wide variety
of materials onto substrates.

 

 

6 Inch Sputter Tool

6 Inch Sputter Tool

6 Inch Sputter Tool

Thin Films

PE 2400 Sputter Tool - 6 Inch

Perkin-Elmer Randex Sputtering System Model 2400

Location: Thin Films M&M 432

Equipment Reservation Calendar

Reservation Instructions

Standard Operating Procedures (PDF)

Inventory

See Also: 8 Inch Sputter Tool

Related External Links

PE 2400 Sputtering System
University of Notre Dame Nanofabrication Facility

Perkin-Elmer Plasma Products Division
ECONOMICAL ALTERNATIVES
The 2400 Series of Sputtering Systems

Inventory

TYPE MOUNTED ON A COPPER VACUUM PLATE
SiO2 Yes
ZnO Yes
Si Yes
Al Yes
MgO Yes
Cu Yes
Ni No
SiO2 No
Mo Yes
MoSi2 Yes
WSi2 Yes
W Yes
Ta/Ni Yes
TaSi2 Yes
ITo Yes

 

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Last updated October 20, 2009