NEW SAFETY TRAINING DOCUMENT added July 8, 2010

NEW CALENDAR: Six Inch Sputter System

The Microfabrication Facility (MFF) is Michigan Tech's resource for micro- and nano-scaled research and development of solid state electronics, micro electro mechanical systems (MEMS), and microsystems materials and devices.

Use charges have increased effective November 1, 2012.

Fall 2012
EE 5471 - Microfabrication Laboratory
A laboratory experience in which the student fabricates micro- and nano-meter devices. This course is intended for graduate students conducting experimental research in Electrical Engineering, Physics, Materials Science and Engineering, Mechanical Engineering, Chemistry, or Chemical Engineering. Mandatory basic laboratory safety training for use of the Microfabrication Facility (MFF) is conducted in this course.
Credits: 2.0 Lec-Rec-Lab: (1-0-3)
Semesters Offered: Fall
Restrictions: Permission of instructor required; Must be enrolled in one of the following Level(s): Graduate
Instructor: Paul Bergstrom
Time and Date TBA