eTraining Introduction

Specimen Preparation

Leica Ultracut UCT



Hitachi S-4700 FE-SEM

Hitachi FB-2000A FIB


Veeco Dim 3000 AFM

Fluorescence Microscopes



Metal Coating Procedure

Equipment is Hummer 6.2 Sputter Coater, Anatech USA and Thickness Monitor Model TM-350, Maxtek Inc.

NOTE: The Au/Pd and Pt/Pd targets are the same silvery color. You must check the uninstalled target to make sure you are using the desired target. We store the 2nd target in the drawer below the coater. The target composition is identified on the back of the target. Please make sure the plastic coated label on the coater describes the installed target.

1. Check to make sure the correct target is installed.    
 1.1. Au/Pd is used for JEOL JSM-6400 SEM specimens.
 1.2. Pt/Pd is common for Hitachi S-4700 FE-SEM specimens.
 1.3. If the target needs to be changed, contact the support staff.
2. Lift the top of the bell jar to rest on the pipe behind it. VIEW
3. Carefully remove the bell jar and place it on a stable surface. VIEW
4. Load specimens. Dust specimens using the air can.
5. Replace the bell jar.
6. Lower the lid and check for fit. VIEW
7. Pressing down on the lid, turn on POWER, and hold the lid down until vacuum display no longer reads 1. VIEW
8. Allow vacuum to pump to 50. (This will take some time.) Switch GAS to ON. VIEW
9. Adjust the flow knob (located behind bell jar) by turning it in the positive direction (counterclockwise) until the Vac goes up to ~90. VIEW
10. Turn on THICKNESS monitor. VIEW
11. Press STOP then START. (The shutter light will turn red.) VIEW
12. Hold the THICKNESS ENDPOINT button down to see thickness. VIEW
 12.1. For this display, remember that 5 nm = 0.05 kÅ.
 12.2. If the thickness needs to be adjusted, push the Thickness Endpoint button and press the up or down arrows to reach your desired thickness. VIEW
13. Check that the VOLTAGE knob is set to zero. VIEW
15. Turn VOLTAGE to 7.0 or less in order to obtain the discharge current. NOTE: The current should not, at any time, exceed 10 mA. (The current can be increased by turning the gas flow knob towards you and decreased by turning the gas flow knob away from you.) VIEW
 15.1. For JEOL JSM-6400 SEM specimens use 10 mA.
 15.2. For Hitachi S-4700 FE-SEM specimens use 5 mA.
16. When thickness endpoint is reached the PLASMA DISCHARGE CURRENT gage will automatically drop down to zero and the VOLTAGE will turn off. VIEW
17. Turn the VOLTAGE knob to 0 and switch VOLTAGE CONTROL to OFF.
18. Turn off THICKNESS monitor.
19. Switch GAS to OFF.
20. Switch off POWER.
21. Let the air bleed and then remove specimens.
22. Replace the bell jar and close the lid.

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