eTraining Introduction

Specimen Preparation

Leica Ultracut UCT



Hitachi S-4700 FE-SEM

Hitachi FB-2000A FIB


Veeco Dim 3000 AFM

Fluorescence Microscopes



EDS X-Ray Spectral Analysis

Prepare the Column

1. The working distance should be 39 mm, the default position.    
2. Set the accelerating voltage to achieve at least 2x over-voltage, usually 20 kV.    
3. Remember to turn off the infrared chamber camera.    
4. Insert the EDS detector into the chamber at 3.5 mm.    
5. Adjust the magnification and focus enough to know where you are on the sample.    
6. Ready the SEM for point analysis by using either the spot mode or zooming to 300,000x on the region of interest.    

Collect the Spectrum

Revolution Toolbar

Revolution Toolbar

The software and icons refer to the 4pi Revolution® software for Windows. Click the toolbar above for a larger view.


Revolution Icon1. Open the Revolution software on the computer. VIEW
2. Before collecting a spectrum, make sure that the Accelerating Voltage is correct. VIEW
3. Choose a Dwell Time of at least 60 seconds. VIEW
Camera Icon4. Select Acquire > Acquire Start or select the camera icon to begin collection. VIEW
5. Make sure the Dead Time is 25% for quantitative analysis, 35% for qualitative analysis or 45% for x-ray maps VIEW

6. Adjust the Dead Time by using the Probe Current Knob on the Main Control Panel.

It can be further adjusted by using the Fine Condenser Lens setting in the EOS Menu; use the arrow keys to highlight the Fine Condenser lens and then use +/- buttons to adjust.

Clear Icon7. Restart the acquisition by selecting the Clear (clr) icon.    
8. To manually identify elements, right-click in the spectrum area and select "Open KLMs". Click on an element for labeling or scan the periodic table, line-by-line, with the left-right arrow keys. Press the spacebar to label. VIEW
Camera Icon9. To stop spectrum acquisition, select Acquire > Acquire Stop or select the camera icon. VIEW
Quant Icon10. Select the Quant (qnt) icon to perform standardless quantitative analysis. It may be necessary to manually select the elements to include in the analysis. Right-click and select "Edit Elements", then choose the elements to include in the analysis. VIEW

Save the Data

1. To give your spectrum a name, right-click on the spectrum and select "Rename Spectrum" or select Option > Rename Spectrum from the toolbar. VIEW
2. To retrieve your spectrum and quant data, select File > Export and choose the file format, usually JPG and MSA. VIEW
Quant Icon3. Turn off quant by deselecting the icon before acquiring a new spectrum. To collect a new spectrum, select File > New. VIEW
4. To add a new subdirectory, navigate to the “Users files” folder in the C drive. Create a new folder labeled with your first and last names within the “Users files” subdirectory.    
5. To save your spectra, select File > Save As. Navigate to your folder by selecting My Computer > C drive > Users files > your folder. VIEW
6. To view all of your collected spectra, use the scroll menu at the top right of the spectrum window. VIEW

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