eTraining Introduction

Specimen Preparation

Leica Ultracut UCT

Histology

JEOL JSM-6400 SEM

Hitachi S-4700 FE-SEM

Hitachi FB-2000A FIB

Microanalysis

Veeco Dim 3000 AFM

Fluorescence Microscopes

Support

Rough Milling for Lift Out Technique

1. Focus and register M1-500 off the area of interest. Use M0-50 to return to the saved position.    
2. Select File > Open: Q_FAB2. Click Edit > Select All Pattern Elements, then position a pattern over the pad. Set Area x Zoom to 256 x 4, and click Get Image button. Click Fabrication Start and allow mill to run for 30-40 min. VIEW
3. Focus and register M0-50. At Area x Zoom = 256 x 1, manually tilt the specimen to 60 degrees and lock the position.    
4. Return to the saved spot and use Area x Zoom = 256 x 4 to focus. Register M1-300 for the undercut, then Get Image.    
5. From the Edit menu, press Clear to remove the QFAB_2 pattern from the screen.    

6. Use the SPUTTER TOOL to draw a rectangular box with the following parameters:

Area x Zoom 256 x 8
Dimensions ~24 x 2
Time 10 min.
Scan Scan Settings

 

VIEW

7. Place the box 6-9 µm below the top edge of specimen. Press the Fabrication Start button.

NOTE: Turn the CONTRAST UP and carefully watch both sides of the milling window move towards the center until it is cut through. When complete, press Stop & Close.

VIEW

8. Select M0-50. At Area x Zoom = 256 x 1, tilt the specimen back to 0 degrees and lock the position.

VIEW
9. At Area x Zoom = 256 x 4, focus register. Check if the back edges are cut. If necessary, perform the mill again by tilting back to 60 degrees, and milling farther up from the bottom edge.    

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