eTraining Introduction

Specimen Preparation

Leica Ultracut UCT



Hitachi S-4700 FE-SEM

Hitachi FB-2000A FIB


Veeco Dim 3000 AFM

Fluorescence Microscopes


Deposition for Lift Out Technique

1. Move the probe left and lower it enough so it is away from the depo gun.    
2. From the DEPO tab menu, select Nozzle Position: Escape. In the MANIPULATION CONTROLLER, turn off HOLD OFF and BUZ ON. Press ESC to remove the probe. Turn the beam OFF. VIEW
3. Close the S.C. AIRLOCK VALVE. Insert the specimen by turning a few degrees counterclockwise and releasing. Open the S.C. AIRLOCK VALVE. Press the Continuous Scan button. VIEW
4. Return to the area to be lifted out.    
5. Select Column Adjustment > File > Quit > OK. Open the Fabrication menu. VIEW

6. Select the following image parameters:

Area x Zoom 256 x 8
Beam Beam-01

NOTE: The Beam Names should match in the Scan section and the Fabrication Condition section.

7. Press Continuous Scan. Locate the area that needs to be lifted out and adjust the focus, brightness, and contrast. Register the settings. VIEW
8. Click the Get Image button. VIEW
9. Check that the depo gun is heated to 6.2 VDC on red voltmeter. VIEW

10. Use the DEPO TOOL to draw a rectangular box for the pad.

Dimensions 15 x 3
Time 10 - 12 min.
Scan Scan Settings

NOTE: Make sure the beam name is changed under the Fabrication Condition as well as on the right panel.


11. Press Fabrication Start button and run until complete. VIEW
12. Use M0-50 to check the deposition quality. VIEW
13. Under the Stage menu, click C. Copy > Save to save position. VIEW

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