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Philips XL 40 ESEM


ESEM down

December 21, 2016. A broken pipe poured water onto the ESEM and computers Monday. Obviously, the microscope is down. We are going to let everything dry out over the holidays and try to restart it in the week of Jan 2.

Philips XL40 ESEM

Ebeam lithography on ESEM

October 10, 2016. Jerry Anzalone has successfully installed the Nabity Pattern Generation System (Ebeam litho) on the Environmental SEM. This instrument has a large motorized stage that is drawn out (no load lock) so a large sample can be attached to the stage. It may be possible to stitch large …