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Hitachi S-4700 FE-SEM

Hitachi S-4700 FE-SEM

FESEM is down

December 14, 2018. The airlock won’t pump down, so it is probably a faulty vacuum pump. Regardless, Hitachi will send us a repair part that might be here on Monday. I’ll send you more info after I talk to them.

Hitachi S-4700 FE-SEM

FESEM is down

November 27, 2018. During a power flicker last night the FESEM vacuum system did some crazy things. I’ve got it back on but the ion pumps have to cool before I can check the scope for functionality. I’m going to take it offline (no use) for the remainder of the …

Hitachi S-4700 FE-SEM

FESEM online

October 9, 2018. There was a problem a few days ago where the FESEM system would completely shut down with no warning. I’ve been working with the engineer to test power supplies but I’ve found nothing wrong. The system has been running overnight with no problems and I ran it …

Hitachi S-4700 FE-SEM

FESEM update

September 19, 2018. The engineers think there is some contamination on a stationary aperture in the column. It will be a big job to change it and it couldn’t be done before next week at the earliest, more likely the week after. I found that the scope works fine at …

Hitachi S-4700 FE-SEM

FESEM problem

September 19, 2018. There is a problem with the FESEM that shows up when adjusting the beam alignment. Usually we should see a nice round spot but now it is stretched our into an ellipse. I’ve contacted the engineers who have given me a few tests to run. The scope …