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Hitachi S-4700 FE-SEM

Hitachi S-4700 FE-SEM

FESEM online

October 9, 2018. There was a problem a few days ago where the FESEM system would completely shut down with no warning. I’ve been working with the engineer to test power supplies but I’ve found nothing wrong. The system has been running overnight with no problems and I ran it …

Hitachi S-4700 FE-SEM

FESEM update

September 19, 2018. The engineers think there is some contamination on a stationary aperture in the column. It will be a big job to change it and it couldn’t be done before next week at the earliest, more likely the week after. I found that the scope works fine at …

Hitachi S-4700 FE-SEM

FESEM problem

September 19, 2018. There is a problem with the FESEM that shows up when adjusting the beam alignment. Usually we should see a nice round spot but now it is stretched our into an ellipse. I’ve contacted the engineers who have given me a few tests to run. The scope …

Hitachi S-4700 FE-SEM

FESEM down

May 11, 2018. The ion pumps shut off last night and I can’t get them restarted. Hitachi is coming Monday and they can get it back on then.   The scope will be down until the middle of next week.  Sorry.

Hitachi S-4700 FE-SEM

FESEM update

May 8, 2018. The FESEM has a cooling system that does not depend on the process water circuit that is going off later this week.  Therefore, I will be leaving the FESEM on over the 2 days that the process water will be off. SO, the FESEM will be on all …