eTraining Introduction

Specimen Preparation

Leica Ultracut UCT

Histology

JEOL JSM-6400 SEM

Hitachi S-4700 FE-SEM

Hitachi FB-2000A FIB

Microanalysis

Veeco Dim 3000 AFM

Fluorescence Microscopes

Support

Fine Milling for Lift Out Technique

NOTE: It is very important that you are focused and registered at this step.

1. Click Get Image. At Area x Zoom = 256 x 8, focus and register M1-200.    

2. Use the SPUTTER TOOL to draw a rectangular box with the following parameters:

Dimensions ~11 x 2
Time At least 4 min. per edge
Scan Scan Settings

Place the box on the upper edge of the protective pad and press Fabrication Start. OBSERVE: THE WHITE PORTION (THE TAPER) SHOULD GRADUALLY DISAPPEAR. Repeat for the lower edge of the protective pad.

NOTE: Repeat the two preceding steps as necessary, alternating the mill on the upper and lower edge on the taper only, until specimen thickness measures 1 µm.

VIEW
3. At Area x Zoom = 32 x 2, focus and register M1-100.    
4. Repeat steps 2 -3 until the specimen is 0.6 µm.    
5. Focus and register M1-50.    
6. Repeat steps 2 -3 until the specimen is 0.2-0.3 µm. VIEW
7. Focus and register M1-50 or M0-50.    
8. Final milling:    
 8.1. Change to Area x Zoom = 32 x 1.
 8.2. Under Stage menu, select C.Copy > Save to save stage position. VIEW
 8.3. Enter 1 degrees to tilt.

8.4. Change area to Area x Zoom = 32 x 2 and Speed: 5. Use the SPUTTER TOOL to draw a rectangle with the following parameters:

Dimensions ~11 x 0.5
Time At least 4 min. per edge
Scan Scan Settings (away from edge)

Correctly position the box on the upper edge.

 

VIEW

8.5. Change Area x Zoom = 32 x 8 and press Fabrication Start. Run the mill many times to check the edge. Run until the specimen is ~70 nm.

NOTE: After changing the Area x Zoom to 32 x 8, only adjust the box VERTICALLY.

 8.6. Change to Area x Zoom = 32 x 1 and Speed: Rapid.
 8.7. Under the Stage menu, enter -1 degrees to tilt.

8.8. Change area to Area x Zoom = 32 x 2 and Speed: 5. Use the SPUTTER TOOL to draw a rectangle with the following parameters:

Dimensions ~11 x 0.5
Time At least 4 min. per edge
Scan Scan Settings (away from edge)

REMINDER: After changing the Area x Zoom to 32 x 8, only adjust the box VERTICALLY.

  8.8.1. Change Area x Zoom to 32 x 8 and press Fabrication Start. Run the mill many times to check the edge. Run until the specimen is ~70 nm.    
  8.8.2. Change Area x Zoom to 32 x 1 and Speed: Rapid. Under the Stage menu, enter 0 degrees to tilt back.    
  8.8.3. Change Area x Zoom to 32 x 8 and focus. You may need to change to Speed: 5. Click Get Image and measure.    
  8.8.4. The final specimen should be 50-70 nm.    
9. Shut down the FIB after Lift Out. See Shut Down in Operating Procedures under Hitachi FB-2000 FIB.    

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