The JEOL JSM-6400 is a research grade tungsten source scanning electron microscope with EDS and WDS.


The JEOL JSM-6400 is a research grade tungsten source scanning electron microscope. It is configured with several sophisticated accessories, including an ultra thin window energy dispersive X-ray spectrometer, three WDS spectrometers, and a Geller dSspec automation system controlling the spectrometers and motorized stage. This microanalysis package is used for surface morphology and composition studies on a wide variety of organic and inorganic materials.



Room 635, M&M Research Building


JEOLImaging modes include secondary electrons, backscattered electrons and X-rays. Under ideal conditions, resolution in secondary electron imaging mode is 5 nm. Images can be recorded with digital image capture through the Geller dPict module with subsequent output to a 1200 dpi laser printer.

GellerCharacteristic X-rays can be detected from as little as a 1 cubic micrometer volume of the specimen. Elements from atomic number 5 (B) to 92 (U) can be detected in concentrations above 0.001 wt% element. Analysis modes include qualitative, standardless, and fully rigorous standards-based quantitative analysis. Additional capabilities of the Geller software package include analog and digital X-ray mapping and report generation. Both analog and digital X-ray or compositional mapping are available.

4piThe Geller automation/analysis system is interfaced to the campus network so all user data can be downloaded to user storage system from the laboratory.

About JEOL: JEOL USA is a leading supplier of scanning electron microscopes, transmission electron microscopes, scanning probe microscopes, mass spectrometers, NMR spectrometers, and semiconductor tools for scientific and industrial purposes. Logo used with permission. See disclaimer below.

About Geller: Geller MicroÅnalytical Laboratory, Inc. provides analytical services and design and manufacturing of a limited number of unique products that are directly related to microanalysis, including computer control systems used in ACMAL. Logo used with permission. See disclaimer below.

About 4pi: 4pi Analysis, Inc. engineers and sells X-ray Microanalysis and Digital Imaging Systems. Logo used with permission. See disclaimer below. (NOTE: 4pi has ceased manufacturing and sales. ACMAL is confident that this will not affect 4pi’s ability to provide technical support to this lab. There is no formal affiliation between 4pi and ACMAL.)

This is to notify you that the material you are accessing is not an official web page of Michigan Technological University, MCFF, or ACMAL. While MTU recognizes the constitutional right of free speech for its University users of the Internet and the World Wide Web, it is not responsible, and hereby disclaims all liability for any data, information, or opinions contained in unofficial web pages. Any comments related to the contents of personal home pages should be directed to the author of the pages. There is no affiliation between ACMAL and JEOL. There is no affiliation between ACMAL and Geller. There is no affiliation between ACMAL and 4pi.



Free online eTraining is available for this instrument. This self-paced tutorial and reference content does not replace course requirements for authorized usage.

Available topics related to this instrument:

Specimen Preparation Online Training JEOL JSM-6400 SEM Online Training Microanalysis Online Training User Support for Online Training


Michigan Tech offers many undergraduate and graduate courses related to materials characterization.

One of these courses offers direct, hands-on training in scanning electron microscopy:

MY 4200 – Introduction to Scanning Electron Microscopy
Introduction to scanning electron microscope (SEM) theory and application. Topics will include electron beam and image formation, beam-specimen interactions, and x-ray microanalysis. Course material will be of interest to biologists, chemists, and engineers. Completion of MY4201 is required for independent use of the equipment.
Credits: 2.0
Lec-Rec-Lab: (2-0-0)
Semesters Offered: Fall
Restrictions: May not be enrolled in one of the following Class(es): Freshman, Sophomore


Last updated May 13, 2014